Abstract Details


dongwon kang

Student at Chung-Ang University

dongwon kang

Student at Chung-Ang University

Abstract Name:

Highly Stable Rad-Hard Metal Oxide Thin-Film Transistors for X-ray Image Sensing Applications

Symposium:

Symposium C: Electronic & Photonic Devices

Topic:

C4: Thin Film Transistor Technologies

Abstract Contributing Authors:

Dongwon Kang(dwkang1999@gmail.com)1, Su Bin Jeon1, Eun Chong Ju1, Jaehyun Kim2, and Sung Kyu Park(skpark@cau.ac.kr)1 1 Department of Intelligent Semiconductor Engineering, Chung-Ang University Seoul 06974, Korea 2 Department of Semiconductor Science, Dongguk University, Seoul 04620, Republic of Korea

Abstract Body:

X-ray radiography has attracted considerable attention in various industries and research fields, including digital X-ray detectors, complementary metal-oxide-semiconductor imaging, and disease diagnostic systems. In the field of X-ray detectors, there is a growing demand for the development of high-performance metal oxide thin-film transistor (MOTFT) panels composed of digital X-ray detectors with radiation hardness. Developing radiation-hard devices and integrated circuits is essential for the realization of high-quality X-ray images with high resolution and good stability. Here we investigate the radiation hardness of MOTFTs under X-ray irradiation, with a specific focus on amorphous indium gallium zinc oxide (a-IGZO, In:Ga:Zn = 1:1:1) and amorphous zinc tin oxide (a-ZTO, Zn:Sn = 7:3). The electrical characteristics, chemical structure, and surface morphology of both MOTFTs were analyzed before and after X-ray exposure. We also systematically analyze the radiation-induced damage, considering the occurrence, ionization, and compensation of oxygen vacancies in the MO semiconductor layers. After X-ray irradiation, a-IGZO TFTs exhibit a significant negative shift in their threshold voltage values (ΔVth ≤ −20 V), whereas a-ZTO TFTs show superior radiation resistance (ΔVth ≤ −10 V), emphasizing relatively stable electrical characteristics against X-ray irradiation. Further, X-ray photoelectron spectroscopy (XPS) measurement were carried out to determine the radiation damage mechanism in MO semiconductor layers. Deconvolution of the O 1s spectra reveals the contribution of oxygen atoms in M-O-M lattice, oxygen atoms near oxygen vacancies (M-Ovac), and oxygen atoms in hydroxyl groups (M-OH compounds) in a-IGZO and a-ZTO thin-films. Clearly, when X-ray is irradiated, the M-O-M content of the a-ZTO films is larger than that of the a-IGZO films, while the M-Ovac content follows an opposite trend. This result demonstrates that a-ZTO TFTs have notable potential of device stability under X-ray irradiation compared to a-IGZO TFTs. In summary, this study provides valuable insights into the radiation hardness of MOTFT, especially when Sn is incorporated, for robust X-ray imaging applications.

Attached Figure:

ICANS30_동원.pdf

Submission Type:

Talk

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